R&D and Prototyping Facility Resources

Modeling: Ray tracing; Comsol; ANSYS; Cosmosworks; Spice; MentorGraphics

Thin Film & Materials Processing (4-5” substrates): PECVD; LPCVD; sputter deposition; inkjet printing; electroplating; thermal evaporation; Perkin Elmer aligner; Karl Suss aligner; spinners; wet etch; plasma etch; HMDS oven; 6 N2 and vacuum ovens; MEMS; excimer lasers; hydrogenator; Nd:YAG and CO2 laser machining systems; chemistry labs; UV cure station

Machining: Complete machine shop in-house

Measurement: Profilometers; ellipsometer; CD measurement; four-point probe

Device Test: Custom probe stations; custom environmental test chambers; low-temperature probe station; custom electrical measurement; custom Hall effect measurement system

Characterization: TEM; SEM; XRD; AFM; surface tensiometer; x-ray diffraction; optical spectroscopy